Repeatability: 0.5 sccm + 0.5% measured value.
Measure flow up to 500 slm or higher.
Full temperature compensation for reliable flow signal.
Configurable operation modes and functions.
FLUSSO Flow Sensor FLS110 series
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FLUSSO Flow Sensor FLS110 series
Detail Small footprint: 3.5mm x 3.5mm.
Repeatability: 0.5 sccm + 0.5% measured value.
Measure flow up to 500 slm or higher.
Full temperature compensation for reliable flow signal.
Configurable operation modes and functions. |